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DB550 双束聚焦离子束扫描电镜在 5nm 工艺节点芯片样品上验证生产级 TEM 制样：鳍式结构完整、零非晶化、薄膜层清晰可辨。
本文为英文官网半导体失效分析方案的中文概述：DB550 双束 FIB-SEM 在同一平台集成高分辨电子成像与纳米级离子束加工，已在真实 5nm 工艺芯片上完成生产级 TEM 样品制备验证。以下为英文原文正文。
The CIQTEK DB550 dual-beam FIB-SEM brings together high-resolution electron imaging and precision ion beam processing on a single platform. CIQTEK has validated its DB550 Focused Ion Beam Scanning Electron Microscope (FIB-SEM) on real 5nm process node chip samples, demonstrating production-ready TEM sample preparation with intact fin structures, zero amorphization, and clearly resolved film layers.
In advanced chip research and manufacturing, two tools matter above all. The Transmission Electron Microscope (TEM) lets you see structures at the atomic scale, but before you can look, you need a sample thin enough for electrons to pass through. The dual-beam FIB-SEM is the precision workshop that prepares those ultra-thin specimens.
The DB550 integrates two powerful capabilities onto a single platform: a scanning electron microscope (SEM) for high-resolution surface imaging, and a focused ion beam (FIB) for nanoscale material removal with surgical precision. At its heart sits a low-voltage, high-resolution electron column paired with CIQTEK's proprietary "Chengying" ion column, developed entirely in-house.
At 5nm and below, chip architectures rely on fin-type field-effect transistors (FinFETs) with fin widths and pitches measured in just a few nanometers. The DB550 handles the full sample preparation workflow: it starts with high-current rough cutting to quickly remove bulk material and reach the target region, then transitions to low-voltage fine polishing to thin the sample to TEM-ready dimensions without damaging delicate structures.
TEM characterization of a 5nm chip sample prepared on the DB550 shows intact fin structures with clear, well-defined film layers and no amorphization damage. The fin structures remained completely intact after FIB preparation, there was no detectable amorphization in the silicon lattice, and the individual film layers appeared clear and sharply defined.
CIQTEK develops the DB550 from the ground up, covering the full technology stack from core hardware to underlying algorithms. The proprietary Chengying ion column, electron optics, stage mechanics and control software are all designed and optimized as an integrated system.
